GENERIC ALIGNMENT PROCEDURES

·         Selectable alignment procedures for flexible product adaptation 
·         Alignment procedure with one fiducial (△x, △y and△t) 
·         Alignment procedures with two fiducials (A, B)
◦         Overlay of fiducial A(△x, △y) with BEST-FIT to fiducial B(△t)
◦         BEST-FIT between fiducials A, B (△x, △y, △t) 
·         Alignment procedures with three fiducials (A, B, C)
◦         Overlay of fiducial A(△x, △y) with BEST-FIT to single fiducial B or C (△t)
◦         Overlay of fiducial A(△x, △y) with BEST-FIT to fiducials B, C (△t)               
◦          BEST-FIT between fiducials A, B, C (△x, △y,△t)